[17a-B5-1~10] 13.3 絶縁膜技術

▲ [17a-B5-4] Silicon Surface oxidation and Passivation by Remote Induction-Coupled Oxygen Plasma

鮫島俊之，蓮見真彦，吉冨真也，中村友彦，^○（B）滋野聖 (東京農工大)

キーワード：passivation