[27p-F1-1~14] 6.5 Surface physics and vacuum

[27p-F1-7] Evaluation of the Mechanical Properties of Silicon Oxide Thin Films on the Flexible Substrate by Nanoindentation.

^○Yoshihiro Shioaku¹, Muneyoshi Iyota¹, Takashi Kuchiyama², Kenji Inoue², Kenji Yamamoto², Masahito Mochizuki¹, Shu Seki¹ (Graduate school of engineering, Osaka University¹, KANEKA Corporation²)

Keywords:酸化ケイ素、ナノインデンテーション