[28a-G22-1~13] 15.6 IV-group-based compounds

[28a-G22-13] Thickness dependence of FTIR-ATR peaks of 4H-SiC thermal oxide films

^○Hirohisa Hirai¹, Koji Kita^1,2 (Univ. of Tokyo¹, JST-PRESTO²)

Keywords:SiC、ATR、熱酸化膜