[28a-G9-1~11] 13.6 Silicon devices / Integration technology

[28a-G9-11] Statistical Analysis of Subthreshold Swing Variability in Fully Depleted Silicon-on-Thin-BOX (SOTB) MOSFETs

^○Tomoko Mizutani¹, Yoshiki Yamamoto², Hideki Makiyama², Hirofumi Shinohara², Toshiaki Iwamatsu², Hidekazu Oda², Nobuyuki Sugii², Toshiro Hiramoto¹ (IIS, Univ. of Tokyo¹, LEAP²)

Keywords:SOI MOSFET、ばらつき、サブスレッショルド係数