[29a-F2-1~11] 6.3 Oxide-based electronics

[29a-F2-2] High-Mobility TiO₂-Channel TFTs with Optimized Anatase Microstructures

^○Takeaki Yajima¹, Go Oike¹, Tomonori Nishimura¹, Kosuke Nagashio¹, Akira Toriumi¹ (Univ. of Tokyo¹)

Keywords:アナターゼ、TFT、PLD