[30p-G6-1~6] 13.4 配線技術

[30p-G6-2] ▲Formation of Highly Pure Nickel Films by Hot-wire-assisted ALD (1:45 PM ～ 2:00 PM)

^○Guangjie Yuan，Hideharu Shimizu，Takeshi Momose，Yukihiro Shimogaki (東大院工)

キーワード：deposition、Ni、Hot Wire