Preliminary study on the fabrication of transferred-substrate InP HBTs using surface activated bonding

Yuta Shiratori

Presentation information

Oral presentation

Code-sharing session » 14.3/15.4 Code-sharing session

[17a-A27-1~11] 14.3/15.4 Code-sharing session

Wed. Sep 17, 2014 9:00 AM - 12:00 PM A27 (N302)

11:15 AM - 11:30 AM

[17a-A27-9] Preliminary study on the fabrication of transferred-substrate InP HBTs using surface activated bonding

^○Yuta Shiratori¹, Norihide Kashio¹, Kenji Kurishima¹, Takuya Hoshi¹, Eiji Higurashi², Hideaki Matsuzaki¹ (NTT Photonics Laboratories¹, Univ. of Tokyo²)

Keywords:InP,HBT,表面活性化接合

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