[18a-A15-1~7] 13.5 Si-English Session

▲ [18a-A15-7] Thermal Decomposition Reaction Mechanism of Ultrathin Oxide on Si(111)

^○(D)Jiayi Tang¹, Shuichi Ogawa¹, Akitaka Yoshigoe², Kiwamu Nishimoto¹, Shinnji Ishidzuka³, Yuden Teraoka², Yuji Takakuwa¹ (Tohoku Univ.¹, JAEA², Nagaoka Univ. Tech.³)

キーワード：酸化膜分解,リアルタイム光電子分光法