The 75th JSAP Autumn Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si-English Session

[18a-A15-1~7] 13.5 Si-English Session

Thu. Sep 18, 2014 10:30 AM - 12:15 PM A15 (E306)

12:00 PM - 12:15 PM

▲ [18a-A15-7] Thermal Decomposition Reaction Mechanism of Ultrathin Oxide on Si(111)

○(D)Jiayi Tang1, Shuichi Ogawa1, Akitaka Yoshigoe2, Kiwamu Nishimoto1, Shinnji Ishidzuka3, Yuden Teraoka2, Yuji Takakuwa1 (Tohoku Univ.1, JAEA2, Nagaoka Univ. Tech.3)

Keywords:酸化膜分解,リアルタイム光電子分光法