The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18a-A8-1~10] 6.2 Carbon-based thin films

Thu. Sep 18, 2014 9:00 AM - 11:45 AM A8 (E207)

9:45 AM - 10:00 AM

△ [18a-A8-4] High-temperature electric characteristics of ALD-Al2O3 films

○Daisuke Matsumura1, Tatsuya Saito1, Atsushi Hiraiwa1, Hiroshi Kawarada1 (Waseda Univ.1)

Keywords:ALD,Al2O3,ダイヤモンド