[18p-C3-1~9] 18.4 Optical Micro-sensing，Manipulation，and Fabrications

▲ [18p-C3-7] Profile monitoring on surface relief gratings by spectroscopic ellipsometry

^〇Roman Antos^1,2，Martin Veis²，Jan Mistrik³，Martin Karlovec³，Miroslav Vlcek³，Takayuki Ishibashi¹ (Nagaoka University of Technology¹，Charles University in Prague²，University of Pardubice³)

キーワード：sinusoidal grating,spectroscopic ellipsometry,nickel