[19a-PB5-1~17] 15.6 IV-group-based compounds

[19a-PB5-12] Dynamical Simulations and First-Principles Analyses of Oxidation Processes on 4H-SiC(0001) Surfaces

^○Takahiro Yamasaki^1,2, Hiroshi Koyama^2,3, Jun Nara^1,2, Tasuo Schimizu⁴, Koichi Kato⁴, Takahisa Ohno^1,2,5 (NIMS¹, MARCEED², RIST³, Toshiba R&D Center⁴, IIS, Univ. of Tokyo⁵)

Keywords:SiC,酸化,C面