7:00 PM - 7:15 PM
[13p-1D-22] Verticality control of hetero-interface at GaN double polarity selective area growth using MOVPE
Keywords:MOVPE,polar,selective area growth
Oral presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
Sun. Sep 13, 2015 1:15 PM - 8:15 PM 1D (141+142)
座長:斉藤 真(三菱化学),岡田 成仁(山口大),岩谷 素顕(名城大)
7:00 PM - 7:15 PM
Keywords:MOVPE,polar,selective area growth