[13p-2C-1~14] 4.1 Plasmonics

▲ [13p-2C-11] Surface-enhanced Raman spectroscopy (SERS) of textured structures with anti-reflection by wet etching and island lithography

〇(D)HsinChia Ho¹, BoKai Chao¹, HsinHung Cheng³, LiWei Nien¹, MiinJang Chen¹, Nagao Tadaaki⁴, JiaHan Li², ChunHway Hsueh¹ (1.Dep. of Materials Sci. and Engineering, Nation Taiwan Univ., 2.Dep. of Engineering Sci. and Ocean Engineering, Nation Taiwan Univ., 3.Dep. of Marine Engineering, Taipei College of Maritime Tech., 4.Center for Materials Nanoarchitectonics, National Institute for Materials Sci.)

Keywords:Surface-enhanced Raman scattering,anti-reflection,wet etching

Using wet etching and island lithography processes, micro-pyramid, nanopillar, and nanopillar-on-pyramid textured substrates were successfully fabricated. The nanopillar-on-pyramid SERS substrates showed lowest reflectance and highest SERS enhancement factor compared with only pyramids or nanopillars case.