[13p-4E-1~20] 6.5 Surface Physics, Vacuum

[13p-4E-11] Correlation between Medium-Energy Electron Diffraction and Surface Wave Resonance

〇Yoshimi Horio¹, Yuji Takakuwa², Shuichi Ogawa² (1.Daido Univ., 2.IMRAM, Tohoku Univ.)

Keywords:medium-energy electron diffraction,silicon,surface wave resonance

A medium-energy electron diffraction (MEED) apparatus equipped with a hand made field emission (FE) gun was newly developped. The acceleration voltage of the FE beam was around 1kV, whose beam current was sufficient for the observation of the MEED pattern. For a Si(001)2x1 sample surface, MEED patterns were observed at widely changed glancing angles (10^o-80^o) of the incident beam. It was found that the patterns dominantly showed Kikuch patterns and bulk diffracted spots. On the other hand, the fractional order spots reflected from the surface structure were observed at only some limitted angles. It will be discussed that the correlation between the surface sensitive angles and surface wave resonance (SWR) conditions.