15:15 〜 15:30
▲ [14p-2C-5] Ultrathin-walled microbubbles for high sensitivity pressure sensing
キーワード：aerostatic pressure sensing,whispering gallery mode,microbubbles
Whispering gallery mode (WGM) microresonators (WGRs) are considered to be excellent candidates for high sensitivity sensing. Here, we report on a relatively new WGM structure, the microbubble, used as a high sensitivity sensor for internal aerostatic pressure. In contrast to conventional WGRs, this structure is hollow and sensing occurs inside the resonator through the evanescent field of the WGMs. Therefore, microbubbles have distinct advantages for optofluidic integration compared to the solid WGRs.
In order to achieve higher sensing resolution, we have fabricated microbubbles with an improved Q-factor and submicron wall thickness. The maximum Q obtained was only one order of magnitude lower than the theoretical prediction. As a direct consequence, we achieved high sensitivity and high resolution aerostatic pressure sensing using this microbubble.
In order to achieve higher sensing resolution, we have fabricated microbubbles with an improved Q-factor and submicron wall thickness. The maximum Q obtained was only one order of magnitude lower than the theoretical prediction. As a direct consequence, we achieved high sensitivity and high resolution aerostatic pressure sensing using this microbubble.