Irradiation effect in the fabrication of Er<sub>2</sub>O<sub>3</sub> film on the sputter-treated Si substrate

Presentation information

Poster presentation

9 Applied Materials Science » 9.5 New functional materials and new phenomena

Mon. Sep 14, 2015 1:30 PM - 3:30 PM PA5 (Event Hall)

1:30 PM - 3:30 PM

〇masaya fujita^1,2, Hidehito Asaoka², Kenji Yamaguchi² (1.Ibaraki Univ., 2.Japan Atomic Energy Agency)

Keywords:ion beam,thin film,silicide