[15a-1B-1~10] 21.1 合同セッションＫ ワイドギャップ酸化物半導体材料・デバイス

[15a-1B-1] [論文奨励賞受賞記念講演] Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow

〇川原村 敏幸¹ (1.高知工科大)

キーワード：論文奨励賞

Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow