[15p-2V-1~22] 8.1 プラズマ生成・制御

▲ [15p-2V-21] Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma

〇Haruka Suzuki¹, Suguru Nakano¹, Hitoshi Itoh^2,3, Makoto Sekine^1,2, Masaru Hori^1,2, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ., 3.Tokyo Electron Ltd.)

キーワード：atmospheric-pressure plasma,microwave