6:30 PM - 8:30 PM
[15p-PB2-4] Silicon substrate temperature measurement in high-power impuls magnetron sputtering using non-contact type optical interferometry
Keywords:Substrate temperature measurement,HiPIMS
Poster presentation
8 Plasma Electronics » 8 Plasma Electronics(Poster)
Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)
6:30 PM - 8:30 PM
Keywords:Substrate temperature measurement,HiPIMS