4:30 PM - 4:45 PM
[16p-4E-11] Study of the Resistance of Antisticking Layers against Repeated UV nanoimprint
Keywords:UV nanoimprint,resinstance of antisticking layer,additive
The study of the resistance of mold Antisticking layer (ASL) was conducted in a way that water contact angles in the mold surface were determined after repeated UV nanoimprint. It was found that the resistance od ASL was largely extended when an additive was used together with a levering agent, which is occasionally added for the enhancement of contact between a resist and a substrate,