The 62nd JSAP Spring Meeting, 2015

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Poster presentation

13 Semiconductors » 13.5 Semiconductor devices and related techologies

[12a-P13-1~11] 13.5 Semiconductor devices and related techologies

Thu. Mar 12, 2015 9:30 AM - 11:30 AM P13 (Gymnasium)

9:30 AM - 11:30 AM

[12a-P13-8] Fabrication of InGaAs channel tri-gate MOSFETs with MOVPE regrown source/drain

〇(M1)Haruki Kinoshita1, Toru Kanazawa1, Seiko Netsu1, Yuichi Mishima1, Yasuyuki Miyamoto1 (1.Tokyo tech)

Keywords:MOSFET,InGaAs,multigate device