Observation of the transparency transition region of ZnO conductive film in high density Zn-O<sub>2</sub> mixture plasma

Presentation information

Poster presentation

Joint Session K » Joint Session K （Poster）

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P18 (Gymnasium)

9:30 AM - 11:30 AM

〇Shota Nonaka¹, Naoki Takeda¹, Naoyuki Sato¹, Takashi Ikehata¹ (1.Ibaraki Univ.)

Keywords:transparent conductive film,low sheet resistance,oxygen plasma