SPM Incident Angle Dependence of Singleshot Tomography Measuring Range

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

Sat. Mar 14, 2015 9:00 AM - 11:30 AM A14 (6A-103)

10:45 AM - 11:00 AM

〇Takaya Kosakai¹, Tuan Banh^1,², Tatsutoshi Shioda¹ (1.Saitama Univ., 2.Sevensix Inc.)

Keywords:interferometer