The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.4 Buried interface sciences with quantum beam

[14a-A16-1~11] 7.4 Buried interface sciences with quantum beam

Sat. Mar 14, 2015 9:00 AM - 12:00 PM A16 (6A-206)

10:00 AM - 10:15 AM

[14a-A16-5] Fabrication and crystal structure of silicon supersaturated with manganese by pulsed laser melting

〇Atsushi Kohno1, Ryo Mizokami1, Takayuki Tajiri1 (1.Fukuoka Univ.)

Keywords:impurity supersaturation doping,pulsed laser melting,in-plane x-ray diffraction