[13a-B7-1~11] 8.2 Plasma measurements and diagnostics

[13a-B7-4] Temporal change in gas and wall temperatures during inductively-coupled plasma assisted DC magnetron discharge

〇Yoshinobu Matsuda¹, Hisayoshi Shinagawa¹, Yasuhiro Chikushi¹, Masanori Shinohara¹ (1.Nagasaki Univ.)

Keywords:gas temperature, diode laser absorption spectroscopy, inductively-coupled plasma

Simultaneous monitoring of ambient temperatures at chamber wall and substrate during the neutral gas temperature measurement in an inductively-coupled plasma revealed that the gas temperature increases with increasing the ambient temperatures. The neutral gas temperature was measured from the absorption line profile of metastable Ar atoms at wavelengths around 696.735nm by diode laser absorption spectroscopy using a home-made external cavity diode laser system. The chamber wall and substrate temperatures slowly increased by the plasma particles bombardment after the onset of the discharge. The neutral gas temperature also slowly increased with the ambient temperatures, but keeling a constant temperature difference between them.