The 77th JSAP Autumn Meeting, 2016

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-D62-1~14] 6.4 Thin films and New materials

Tue. Sep 13, 2016 1:45 PM - 5:30 PM D62 (Bandaijima Bldg.)

Tetsuo Tsuchiya(AIST), Masami Nishikawa(Nagaoka Univ. of Tech.)

3:15 PM - 3:30 PM

[13p-D62-7] The Internal Stress of an Optical Thin Film Deposited by Sputtering and Vacuum Deposition

〇naoya tajima1, Hiroshi Murotani1, Shigeharu Matsumoto2, Hiromitsu Honda2 (1.Tokai Univ., 2.SHINCRON CO.,LTD.)

Keywords:Optical Thin Films, Internal Stress, Sputtering and Vacuum Deposition