The 77th JSAP Autumn Meeting, 2016

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-D62-1~14] 6.4 Thin films and New materials

Tue. Sep 13, 2016 1:45 PM - 5:30 PM D62 (Bandaijima Bldg.)

Tetsuo Tsuchiya(AIST), Masami Nishikawa(Nagaoka Univ. of Tech.)

3:45 PM - 4:00 PM

[13p-D62-8] Gauge factor of Cr-N thin film strain sensors in high temperature range

〇Eiji Niwa1 (1.DENJIKEN)

Keywords:Cr-N thin film, gauge factor, high temperature

A Cr-N thin film shows a gauge factor of 17 and a temperature coefficient of resistivity of about zero, which is expected as a new strain gauge material in the next generation. We investigeted gauge factors of the films in high temperature range. As a result, it was found that the factors showed relatively large values more than 3.7 until 450℃.