[14p-D62-1~20] 9.2 ナノワイヤ・ナノ粒子

[14p-D62-16] ナノスケール熱制御による高感度・省エネルギー酸化物ナノワイヤ分子センサ設計

Meng Gang¹、Zhuge Fuwei¹、〇長島 一樹¹、金井 真樹¹、髙橋 綱己²、内田 建²、柳田 剛¹ (1.九大先導研、2.慶大理工)

キーワード：酸化物ナノワイヤ、センサ

Integrating sensors for volatile molecule species into portable electronic devices is strongly desired for forthcoming sensor network society. However, high energy consumption (~mJ) and high temperature (~300^oC) required for operating conventional gas sensors have been bottleneck issues to apply these for CMOS electronics and also emerging wearable electronics. Here we report the nanoscale thermal management of oxide nanowire sensor in both spatial and time domains by utilizing unique thermal properties of nanowires, which are (1) the reduced thermal conductivity and (2) the short thermal relaxation time down to several microseconds. Our method utilizes a pulsed self-Joule-heating of suspended SnO₂ nanowire device, which enables not only the gigantic reduction of energy consumption down to ~ 100 pJ/s, but also enhancing the sensitivity for electrical sensing of NO₂ (100 ppb). Furthermore, we demonstrate the applicability of the present method as sensors on flexible PEN substrate. Thus, this proposed thermal management concept of nanowires in both spatial and time domains offers a strategy for exploring novel functionalities of nanowire-based devices.
References
[1] Zhuge et al., J. Am. Chem. Soc., 136, 14100 (2014), [2] Nagashima et al., Nano Lett., 15, 6406 (2015), [3] Meng et al., ACS Sensors (2016) in press