[15p-B9-1~17] 13.3 絶縁膜技術

▲ [15p-B9-1] [Young Scientist Presentation Award Speech] Effects of nitrogen bonding on para-/ferroelectric transition of HfO₂

〇Lun Xu¹、Tomonori Nishimura¹、Shigehisa Shibayama¹、Takeaki Yajima¹、Shinji Migita²、Akira Toriumi¹ (1.The Univ. of Tokyo、2.AIST)

キーワード：HfO2, ferroelectric, nitrogen doping