[16a-P6-1~9] 15.8 Crystal evaluation, impurities and crystal defects

[16a-P6-8] TEM analysis of ZnO thin films grown on a-,c-, and r-plane sapphire substrates

〇Saito Ochiai¹, Noriyuki Hasuike¹, Hiroshi Harima¹, Koji Nishio¹, Toshiyuki Isshiki¹ (1.Kyoto Inst. of Tech.)

Keywords:oxide semiconductor