[19p-S221-1~8] 日韓ジョイントシンポ：機能性２次元材料の現状と新展開

▲ [19p-S221-5] Surface engineering of two-dimensional atomic crystals for performance enhancement and its application

〇Yu Young-Jun¹ (1.Electronics and Telecommunications Research Institute (ETRI))

キーワード：two-dimensional atomic crystals,van der Waals heterostructures

The next generation electronics need to not only be smaller but also be more flexible. To meet such demands, van der Waals (vdW) heterostructures using two dimensional (2D) atomic crystals such as graphene, hexagonal boron nitride (h-BN) and transition metal dichalcogenides (TMDCs) have been attracted intensely. In particular, for high performance of vdW heterostructures device, ultraclean interface between stacked 2D atomic crystals should be guaranteed. In this talk, I will present fabrication and characterization of the vdW heterostructure field effect transistors (FETs) toward performance enhancement by employing TMDCs channel, h-BN insulating layer and graphene electrode and its application for gas molecule sensor. Furthermore, surface engineering of 2D atomic crystals FETs by straightforward process for deposition of epitaxially self-assembled alkane layers leading to remarkable enhancement in the performance will also be introduced.