15:15 〜 15:45
▲ [19p-W521-4] Highly flexible low voltage electronic devices based on ultrathin polymer dielectrics
キーワード:gate dielectric,flexible electronics,polymer insulator
This talk will describe advances recently made for flexible gate dielectric layers key to the success of low-voltage, highly flexible electronics. In particular, those based on initiated chemical vapor deposition (iCVD) are demonstrated as versatile gate dielectric layers that exhibit excellent down-scalability, compatibility with various emerging semiconductor materials. Low voltage flexible transistors and other devices based on them are presented as an example where the proposed polymer dielectric layers play a crucial role.