[20a-P1-1~10] 6.1 Ferroelectric thin films

[20a-P1-9] Deposition and Characterization of BiFeO₃ Thin Film for Piezoelectric Tactile Sensor

〇Takeshi Kohno¹, Masato Mihara¹, Ataru Tanabe¹, Takashi Abe¹, Masanori Okuyama², Masayuki Sohgawa¹ (1.Niigata Univ., 2.Osaka Univ.)

Keywords:Ti micro cantilever,BiFeO3,tactile sensor

We have developed the tactile sensor using microcantilever with NiCr strain gauge.In this work, BiFeO₃ piezoelectric film has been deposited on Si and Ti substrates for detection part of the tactile sensor.BiFeO₃ film deposited on each substrate shows good crystallinity and ferroelectricity, however,remanent polarization on Ti substrate is < 1/10 smaller than that on Si substrate.