[21p-S223-1~17] 13.2 探索的材料物性・基礎物性

▲ [21p-S223-10] Effects of pulse laser annealing on the crystallinity and electrical properties of B-doped BaSi₂ epitaxial thin films

〇(B)Miftahullatif Emha Bayu¹、Urai H.¹、Tsukahara Daichi¹、Toko Kaoru¹、Makimura Tetsuya¹、Suemasu Takashi¹ (1.Univ. of Tsukuba)

キーワード：semiconductor,silicide semiconductor,laser annealing