[5p-S41-1~20] 7.2 電子ビーム応用

▼ [5p-S41-7] Dependence of channeling contrast on detection angle in SEMs

〇Thantip Sirinabhigupta Krasienapibal¹、Yasuhiro Shirasaki¹、Momoyo Enyama¹ (1.HItachi Ltd.)

キーワード：channeling contrast, crystal information