[7a-A202-1~8] 6.3 酸化物エレクトロニクス

▲ [7a-A202-7] Synthesis and Characterization of ZnO and Al-doped ZnO Nanostructures at Different Annealing Temperatures

Sameera Attanayake²、Masayuki Okaya¹、〇Kenji Murakami¹ (1.GSIST, Shizuoka Univ.、2.GSST, Shizuoka Univ.)

キーワード：ZnO nanostructures, transparent conducting layer, spray pyrolysis deposition technique

ZnO nanostructures were synthesized by using the Advance Spray Pyrolysis Deposition (ASPD) technique with rotational, pulsed and atomized modes. This technique can control many deposition conditions such as nozzle height, deposition angle, rotation speed, number of rotations and time interval. Synthesized films were characterized by using X-ray diffraction patterns, field emission scanning electron microscopy images and energy-dispersive X-ray spectroscopy graphs.