The 78th JSAP Autumn Meeting, 2017

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Poster presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[7p-PB1-1~8] 6.5 Surface Physics, Vacuum

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PB1 (P)

1:30 PM - 3:30 PM

[7p-PB1-4] Automatic pressure control toward UHV surface process researches

〇(B)Yusuke Ajikawa1, Yukio Yamamoto1, Hikaru Yoshida2, Akitaka Yoshigoe2 (1.NIT-Fukui, 2.JAEA)

Keywords:variable leak valve, vacuum, control