[8a-PA4-1~31] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

[8a-PA4-9] The spatial distribution of electrical and structural properties in transparent conductive Al-doped ZnO polycrystalline films deposited by magnetron sputtering

〇Junichi Nomoto¹, Katsuhiko Inaba², Shintaro Kobayashi², Minoru Osada³, Hisao Makino¹, Tetsuya Yamamoto¹ (1.Research Inst. Kochi Univ. Tech., 2.X-Ray Research Lab., Rigaku Corporation, 3.International Center for Materials Nanoarchitectonics, National Institute of Materials Science)

Keywords:Transparent conductive films, ZnO, Magnetron sputtering