[8p-PB1-1~19] 15.4 III-V-group nitride crystals

[8p-PB1-14] Structural analysis of nanocomposite AlN films deposited by reactive coaxial arc plasma deposition

〇Tomohiro Yoshida¹, Kouki Murasawa², Masaki Kudo³, Toriyama Takaaki³, Uchida Seiya⁴, Fukui Yasuo², Sakurai Masatoshi², Yoshitake Tsuyoshi⁴ (1.Mech. & Elec. Res. Inst., Fukuoka Ind. Tech. Center, 2.OSG Corp., 3.The Ultramicroscopy Research Center, Kyushu Univ., 4.Kyushu Univ.)

Keywords:nanocomposite, AlN