Yuichi Nishimura

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 4:15 PM 318 (318)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15p-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

3:45 PM - 4:00 PM

[15p-318-10] Development of LPP-EUV light source for optical lithography

〇Yuichi Nishimura¹, Yuuki Takeda¹, Rei Takenaka¹, Yuta Takashima¹, Tsutomu Kashiwazaki¹, Takahisa Fujimaki¹, Osamu Fukuda¹, Takayuki Osanai¹, Koutaro Miyashita¹, Hirokazu Hosoda¹, Masahiko Andou¹, Katsuhiko Wakana¹, Takayuki Yabu¹, Yoshifumi Ueno¹, Toru Suzuki¹, Tsukasa Hori¹, Tamotsu Abe¹, Takashi Saitou¹, Hakaru Mizoguchi¹ (1.Gigaphoton Inc.)

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