16:00 〜 18:00 ▲ [15p-P14-3] Trichloroethene Concentration Effect on Deposition Rate and Properties of Low-Temperature Grown SiO2 Films by using Silicone Oil and Ozone Gas 〇(D)Jain Puneet1、Horita Susumu1 (1.Japan Adv. Inst. Sci. & Tech. (JAIST))