[15a-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-318-6] Development of Cr/Sc/Mo multilayer condenser mirror for soft X-rays around a wavelength of 4 nm

〇Tadashi Hatano¹, Takeo Ejima¹ (1.IMRAM, Tohoku Univ.)

Keywords:multilayer, water window soft X-ray, reflectometry

We developed a grazing incidence multilayer condenser mirror for soft X-ray microscopic use with laser produced plasma sources around a wavelength of 4 nm. In our previous study, 20 period Cr/Sc multilayers suffered damage when they were deposited on toroidal substrates. This time, 10 period Cr/Sc/Mo multilayers were successfully deposited on toroidal substrates. Their reflectance was measured and reflectance higher than 10% was confirmed over a wavelength range of 3.9 – 4.0 nm.