[16a-414-1~9] 12.1 Fabrications and Structure Controls

[16a-414-8] Measurement of incident molecular temperature in the formation of organic thin films

〇Takahiro Abe¹, Munetaka Hayakawa², Akifumi Shimoyama², Takaaki Tanaka², Akira Tsuji², Yoshikazu Takahashi³, Ryosuke Matsubara¹, Atsushi Kubono¹ (1.Shizuoka Univ., 2.KOJIMA PRESS INDUSTRY, 3.TI Corporation.)

Keywords:organic thin film growth, molecular temperature, vapor deposition