The 64th JSAP Spring Meeting, 2017

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13 Semiconductors » 13.5 Semiconductor devices and related technologies

[16p-412-1~20] 13.5 Semiconductor devices and related technologies

6.1と13.3と13.5のコードシェアセッションあり

Thu. Mar 16, 2017 1:15 PM - 6:30 PM 412 (412)

Keiji Ikeda(TOSHIBA), Masaharu Kobayashi(Univ. of Tokyo)

2:45 PM - 3:00 PM

[16p-412-7] Fabrication process of thin-body InGaAs-OI TFET on Si by Direct Wafer Bonding

〇DAEHWAN AHN1, SANGHEE YOON1, MITSURU TAKENAKA1, SHINICHI TAKAGI1 (1.The Univ. of Tokyo)

Keywords:InGaAs, Tunnel FET, On Insulator