[18p-234A-1~3] 8.6 Plasma Electronics English Session

▲ [18p-234A-2] Enhancements of plume characteristics of low power atmospheric pressure Ar plasma with electromagnet

〇(D)JoeyKim Tumbali Soriano¹、Takashi Tori¹、Paolo Edward Tan²、Motoi Wada¹ (1.Doshisha Univ.、2.Ateneo De Manila Univ.)

キーワード：atmospheric pressure plasma, RF plasma, magnetic enhancement

In some applications like plasma welding, magnetic field enhances plasma production and stability. In this study, solenoid electromagnet is installed to produce a local magnetic field improving the plume characteristics of low power atmospheric pressure Ar plasma. The current supply used in the electromagnet varied from 50-90 A has magnetic flux density spatial profile. The 2 L/min Ar gas flows inside the quartz tube and it is regulated using a gas flow meter. The Ar plasma develops upon generating current from the 13.56 MHz RF power supply to the 2-mm diameter copper wire wound helically (4 turns) around a 5.7 cm long quartz dielectric tube (5 mm ID, 7 mm OD). Produced plasma emits line radiations of N₂⁺ (356.18 nm) and Ar (763.51 nm). Increase in intensity ratio of N₂⁺ and Ar and total ion density is observed with increasing electromagnet current at position C.