[19p-PA2-1~6] 1.3 新技術・複合新領域

▲ [19p-PA2-3] Heating equipment with carbon heating used to activate silicon and fabricate its solar cells

〇Toshitaka Kikuchi¹、Takashi Sugawara¹、Takuma Uehara¹、Tomoyoshi Miyazaki^1,2、Go Kobayashi³、Masahiko Hasumi¹、Toshiyuki Sameshima¹ (1.TUAT、2.Techno Research、3.Orc manufacturing)

キーワード：activation, microwave, carbon