[21p-145-1~14] 13.3 絶縁膜技術

▲ [21p-145-14] Accurate measurement of the internal potential in two capacitors connected in series for studying Negative Capacitance effects

〇(P)Xiuyan Li¹、Tomonori Nishimura¹、Akira Toriumi¹ (1.Univ. of Tokyo)

キーワード：Negative Capacitance, Internal potential

The channel potential amplification by a ferroelectric(FE) gate oxide, namely a negative capacitance (NC) effect, needs to be experimentally verified before showing steep subthreshold swing. An accurate measurement of the internal potential at the floating node in two capacitors connected in series may provide a more direct evidence. In this paper, we discuss how to measure the internal potential and its significance on the NC demonstration so far reported.