[17p-P4-1~7] 3.14 Optical control devices and optical fibers

[17p-P4-2] Si/LiNbO₃ Hybrid Waveguide and Modulator

〇(M1)Kenta Yoshidomi¹, Feng Qiu², Shiyoshi Yokoyama^1,2 (1.Kyushu Univ, 2.IMCE)

Keywords:LiNbO3, optical modulator, silicon waveguide

We use the thin-Si layer on LiNbO₃/SiO₂/Si in order to fabricate the hybrid Si-LNOI waveguide modulator. The thickness of the Si layer is 50 nm, therefore the large part of the optical field penetrates into the layer of LiNbO₃ in the waveguide. We demonstrate the phase modulator of Si-LNOI waveguide, revealing the half-wave voltage of 4.0V. The more suitable design of the hybrid structure may reduce the driving voltage. The high-speed signal processing is next out step.