[18a-C204-1~5] 8.6 Plasma Electronics English Session

▲ [18a-C204-3] Molecular Dynamics Simulation for Physical Sputtering of Surfaces made of Lennard-Jones Atoms

〇Nicolas Aini Mauchamp¹、Michiro Isobe¹、Satoshi Hamaguchi¹ (1.Osaka University)

キーワード：MD Simulation, Plasma etching

Collision cascade dynamics has been widely studied experimentally and theoretically. However, even for particles interacting via simple two-body potential functions such as Lennard-Jones potential functions, the exact dependence of the sputtering yield on the potential functions has not been well understood yet. The goal of this study is to evaluate the sputtering yield of a surface made of particles interacting with Lenard-Jones potential by the injection of energetic particles of fully repulsive interaction.